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MEMS Expert Witness: What are MEMS and How are They Used in Modern Technology?

By Dr. Chris Daft What are MEMS? “MEMS” is an acronym standing for Micro-Electro-Mechanical Systems.  These are tiny mechanical devices which are made in integrated circuit (IC) factories.  When the technologies for electronic chips were developed, there was an unanticipated parallel benefit: the ability to precisely manufacture mechanical devices with very small features. The celebrated… read more

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